Determine parametric operational space for equipment as defined by technical need, customer requirements and marketing input. Identify areas requiring additional data, characterization, and documentation and initiate plans to provide that information.

Generate a formal characterization plan for the tool set. Include all areas of operation affecting final tool performance, including source, AMU magnet, etc.

Generate a data package consisting of a snapshot of the current operational window of the tool. This package should be based on current machine specifications. This package will be available to marketing, sales, and internal customers. This package should be regularly updated and maintained in an organized, accessible format. Initiate plan to collect relevant information and follow through with reports, technical notes, and applications "Best Methods" Documents.

Continuously monitor new hardware and procedures introduced on tool set. Assist in definition, characterization and documentation as required.

II. Interact with customer installed-base

Collect and maintain information on existing customers. Include information on processes, technology node, beta-site status, production volume, etc.

Collect information related to SPC type performance of the tool, including information on repeatability, particles, manufacturing up-time, and other relevant metrics. Document for internal distribution.

Interact with customers to identify areas of performance requiring further characterization, including new processes and applications.

III. Interaction with Equipment Demonstration Lab

Work with Systems Engineers and Equipment Technologists in performing customer related tool demonstrations. This includes reviewing the initial request for technical content and requirements, determining feasibility, and reviewing requirements with the customer as required. Assist in running wafers, setting up recipes, and reviewing system qualification prior to running customer wafers. Ensure proper tool performance to meet customer requirements.

Write and distribute report on the demonstration to the customer. Follow up with the customer on tool performance, including yield, charging, or other pertinent information. Distribute in-house accordingly.

IV. Work with Marketing and Systems Engineers to meet Operating Specifications

Provide feedback to marketing and engineering on tool performance as additional understanding and characterization is available. Assist in determining operational specifications for new processes and/or hardware. Document and maintain as required.

Provide competitive differentiating data as required by marketing. Collect and maintain information on competitor tools and processes. Identify strengths and weaknesses of tool and assist in determining an action plan to strengthen overall product position.

V. Identify New Applications for Tools

Identify new applications as determined through interactions with customers, marketing, and research in literature. Initiate plans and joint development programs with customers to determine tool performance for these applications (example: Deep UV resists, Advanced HALO implants)

Help communicate and coordinate efforts within engineering for required tool upgrades, including hardware and software. Disseminate information to all other departments.